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Summer School on Computational Materials Science
2002
University of Illinois, Urbana-Champaign

Back to Summer School 2002

MEMS Applications

Chang Liu - changliu@uiuc.edu

Department of Electrical and Computer Engineering and Department of Mechanical and Industrial Engineering

University of Illinois at Urbana-Champaign


Outline of Lecture

  1. Bulk Silicon Micromachining
    1. Types of bulk micromachining
    2. Silicon anisotropic etching
    3. Etching simulation with ACES
  2. Surface Micromachining
    1. Definition of surface micromachining
    2. Most common surface micromachining materials - polysilicon and silicon oxide
    3. Other sacrificial processing systems
    4. Stiction and anti-stiction solutions
    5. Multi User MEMS Process (MUMPS)
  3. Integrated Microfluid Systems
    1. Basic argument for microfluid systems
    2. Very basic fluid mechanics concepts
    3. Microfabrication techniques
    4. Example of microfluid systems
  4. Micromachined Switches and Relays
    1. Relays: for low frequency signals
    2. Switches: for low and high frequency signals
    3. Electrostatic actuation
    4. Electromagnetic actuation
    5. Thermal bimetallic actuation
  5. Scanning Probe Microscopy (SPM) and MEMS
    1. Introduction: Various types of SPM technology
    2. Probe Fabrication
    3. Probe position monitoring
    4. Active probe lithography
    5. An example of active probe for data storage

Lecture 1

Bulk Silicon Micromachining
  Presentation - download (4.54 MB PDF)

Lecture 2

Surface Micromachining
  Presentation - download (2.36 MB PDF)

Lecture 3

Integrated Microfluid Systems
  Presentation - download (4.0 MB PDF)

Lecture 4

Micromachined Switches and Relays
  Presentation - download (1.42 MB PDF)

Lecture 5

Scanning Probe Microscopy and MEMS
  Presentation - download (3.9 MB PDF)

 


Last Updated August 20, 2002
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